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газофазная эпитаксияstresses
microel. Dampfphasenepitaxie f; Gasphasenepitaxie f; Vapour Phase Epitaxy. Gasphasenepitaxie
microel., BrE Vapour Phase Epitaxy
quant.el. Epitaxie aus der Gasphase
газофазная эпитаксия: 2 phrases in 1 subject
Microelectronics2

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