 |
| |||
| feature size (microcircuits) | |||
| feature size; geometry size; pattern size | |||
| |||
| structural characteristics | |||
| Strukturgröße: 10 phrases in 4 subjects |
| Electronics | 1 |
| General | 1 |
| Information technology | 1 |
| Microelectronics | 7 |
|
| |||
| feature size (microcircuits) | |||
| feature size; geometry size; pattern size | |||
| |||
| structural characteristics | |||
| Strukturgröße: 10 phrases in 4 subjects |
| Electronics | 1 |
| General | 1 |
| Information technology | 1 |
| Microelectronics | 7 |