 |
Prozessschritte
| für
Submikrometer Merkmalausdehnung
| Prozessschritte | |
| tech. | process steps |
| FUR | |
| med. | fluorouridine |
| für | |
| gen. | after; by; blaze; for; in favour |
| econ. | on behalf of |
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| process step | |||
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| process steps | |||
| Prozessschritte: 4 phrases in 2 subjects |
| General | 1 |
| Microelectronics | 3 |