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напыление тонких плёнокstresses
microel. thin-film evaporation
nano thin-film sputtering
напыление тонкой плёнки
quant.el. thin-film deposition
напыление тонкой плёнки: 7 phrases in 5 subjects
Electronics2
Makarov1
Mass media1
Microelectronics2
Technology1

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