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for subject
Microelectronics
containing
spot-on
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all forms
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exact matches only
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in specified order only
English
German
high
spot on
the wafer
erhöhte Stelle auf dem Wafer
on-axis spot size
axiale Strahlgröße
(Elektronenlithografie)
spot size change on the fly
kontinuierliche Sondengrößenänderung
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